SMC Process Gas Equipment (AP, BP1000W Series) delivers Ultra High Purity (UHP) gas solutions for semiconductors and clean industries, featuring regulators, diaphragm valves, and check valves with Hastelloy® internals and electropolished 316L SS. Offering high-flow capacities and minimal particle generation, these helium leak-tested units are ideal for specialty gas delivery.
UHP gas equipment for semiconductor and clean industry applications.
SMC Process Gas Equipment (AP, BP1000W Series) delivers Ultra High Purity (UHP) gas solutions for semiconductors and clean industries, featuring regulators, diaphragm valves, and check valves with Hastelloy® internals and electropolished 316L SS. Offering high-flow capacities and minimal particle generation, these helium leak-tested units are ideal for specialty gas delivery.
| Types | UHP Regulators, Diaphragm Valves, Check Valves/Vacuum Generators/Flow Switches |
|---|---|
| Pressure Range | Low to high capacities (varies by model) |
| Features | Hastelloy® internals, 316L SS, tube stub weld fittings, helium leak tested |
| Applications | Semiconductors, solar, flat panel displays |
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