SMC High Vacuum Equipment (XL, XM, XGT, XVD, XSA Series) delivers precision for semiconductor and electronics industries with angle valves, slit valves, and smooth vent valves. Featuring minimal outgassing, replaceable bellows, and leak-tight performance down to 1×10⁻⁶ Pa, these lightweight units with two million cycle durability are ideal for high vacuum applications.
High vacuum valves and equipment for precision industrial use.
SMC High Vacuum Equipment (XL, XM, XGT, XVD, XSA Series) delivers precision for semiconductor and electronics industries with angle valves, slit valves, and smooth vent valves. Featuring minimal outgassing, replaceable bellows, and leak-tight performance down to 1×10⁻⁶ Pa, these lightweight units with two million cycle durability are ideal for high vacuum applications.
| Types | XL/XM (Angle/In-Line), XGT (Slit), XVD (Smooth Vent), XSA (Solenoid) |
|---|---|
| Vacuum Level | Down to 1×10⁻⁶ Pa |
| Features | Minimal outgassing, replaceable bellows, leak-tight |
| Durability | Up to 2 million cycles |
| Applications | Semiconductors, electronics, food processing |
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